Innovative plasma processing for opening new industry
Published:2019-10-23
Speaker: Dr. Hajime SAKAKITA
Time and Date: 2:00 pm, October 24, 2019
Place: Room 302 of Xingye Optical Building, Handan Campus, Fudan University
Abstract:
For contributing achievement of a safe and secure super-aging society, we have pursued R&D of innovative energy-saving and low environmental impact electronic devices through advanced plasma process technology. In the presentation, I will show novel processing technologies for the production such as nitrides and carbon materials, and for life sciences.